
基本信息:
- 专利标题: 矢量水声传感器
- 专利标题(英):Vector sound water sensor
- 申请号:CN201910941430.6 申请日:2019-09-30
- 公开(公告)号:CN110631688A 公开(公告)日:2019-12-31
- 发明人: 史晓晶 , 柳俊文
- 申请人: 南京元感微电子有限公司
- 申请人地址: 江苏省南京市浦口区高新技术开发区星火路17号创智大厦B座6楼
- 专利权人: 南京元感微电子有限公司
- 当前专利权人: 南京元感微电子有限公司
- 当前专利权人地址: 江苏省南京市浦口区高新技术开发区星火路17号创智大厦B座6楼
- 代理机构: 北京中知法苑知识产权代理事务所
- 代理人: 赵吉阳; 李明
- 主分类号: G01H11/06
- IPC分类号: G01H11/06 ; G01S7/521
The invention provides a vector sound water sensor. The vector sound water sensor comprises a substrate, a vector chip and a water sound receiving piece, wherein the vector chip is arranged on the substrate, the water sound receiving piece is connected with the vector chip, the vector chip comprises a silicon substrate, a water sound measurement piece, chip pins, TGV glass and metal via holes, thewater sound measurement piece is arranged on the silicon substrate along at least two different directions, the metal via holes are formed in the TGV glass, the TGV glass is sandwiched between the substrate and the silicon substrate, the chip pins are respectively connected with the water sound measurement piece and the metal via holes, the water sound receiving piece is used for receiving a vector water sound signal, the water sound measurement piece is used for converting the vector water sound signal to a vector electrical signal, and the TGV glass is used for sealing the chip pins and sending out the electrical signals by the metal via holes. By the vector sound water sensor, a sound field vector signal can be measured, the positioning accuracy is improved, an external water environment medium can be in direct contact, a sound transmission cover is not needed to be arranged, the energy loss brought by the sound transmission cover is prevented, the sensitivity is improved, the sizeis small, the volume of a sonar system can be reduced, and the implementation difficulty of sonar system engineering is reduced.
公开/授权文献:
- CN110631688B 矢量水声传感器 公开/授权日:2022-01-25
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01H | 机械振动或超声波、声波或次声波的测量 |
------G01H11/00 | 通过检测电或磁特性的变化测量机械振动或超声波、声波或次声波 |
--------G01H11/06 | .用电的方法 |