
基本信息:
- 专利标题: 一种GaN基激光器和AlGaN/GaN HEMT集成器件制备方法
- 专利标题(英):Preparation method of GaN-based laser and AlGaN/GaN HEMT integrated device
- 申请号:CN201910776876.8 申请日:2019-08-22
- 公开(公告)号:CN110600470A 公开(公告)日:2019-12-20
- 发明人: 田朋飞 , 闫春辉 , 林润泽 , 方志来 , 张国旗
- 申请人: 深圳第三代半导体研究院
- 申请人地址: 广东省深圳市南山区西丽大学城学苑大道1088号台州楼
- 专利权人: 深圳第三代半导体研究院
- 当前专利权人: 纳微朗科技(深圳)有限公司
- 当前专利权人地址: 518109 广东省深圳市龙华区观澜街道库坑社区库坑观光路1310号厂房1栋409
- 代理机构: 北京中知法苑知识产权代理事务所
- 代理人: 李明
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L29/20 ; H01L29/778 ; H01S5/34 ; H01S5/343
The invention provides a preparation method of a GaN-based laser and AlGaN/GaN HEMT integrated device. The method comprises the following steps of S1, preparing a GaN-based laser on a GaN-based lasersubstrate layer, and preparing a first AlGaN/GaN HEMT epitaxial wafer on a first substrate; S2, performing sequential etching in a dry etching manner to obtain a mesa structure, an AlGaN/GaN HEMT transfer region and an AlGaN/GaN HEMT mesa structure of the laser; S3, removing the first substrate of the first AlGaN/GaN HEMT epitaxial wafer in a wet etching manner to obtain a second AlGaN/GaN HEMT epitaxial wafer; S4, transferring the second AlGaN/GaN HEMT epitaxial wafer to a second substrate to obtain a third AlGaN/GaN HEMT epitaxial wafer; S5, bonding the third AlGaN/GaN HEMT epitaxial wafer with the GaN-based laser by an adhesive material; and S6, preparing a passivation layer and electrodes. The method avoids the technical problems of poor isolation and low safety of an original preparation method and realizes the technical effects of high safety, high frequency resistance, high voltage resistance and easy mass production of a device system.
公开/授权文献:
- CN110600470B 一种GaN基激光器和AlGaN/GaN HEMT集成器件制备方法 公开/授权日:2021-10-22
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L27/00 | 由在一个共用衬底内或其上形成的多个半导体或其他固态组件组成的器件 |
--------H01L27/02 | .包括有专门适用于整流、振荡、放大或切换的半导体组件并且至少有一个电位跃变势垒或者表面势垒的;包括至少有一个跃变势垒或者表面势垒的无源集成电路单元的 |
----------H01L27/04 | ..其衬底为半导体的 |
------------H01L27/06 | ...在非重复结构中包括有多个单个组件的 |