
基本信息:
- 专利标题: 一种非球形硅溶胶的制备方法
- 专利标题(英):Preparation method of non-spherical silica sol
- 申请号:CN201110240830.8 申请日:2011-08-22
- 公开(公告)号:CN102390838A 公开(公告)日:2012-03-28
- 发明人: 仲跻和 , 唐会明 , 马超 , 徐功涛
- 申请人: 天津晶岭电子材料科技有限公司
- 申请人地址: 天津市西青区微电子园中晓园微六路2—B
- 专利权人: 天津晶岭电子材料科技有限公司
- 当前专利权人: 天津晶岭电子材料科技有限公司
- 当前专利权人地址: 天津市西青区微电子园中晓园微六路2—B
- 代理机构: 南京正联知识产权代理有限公司
- 代理人: 卢霞
- 主分类号: C01B33/14
- IPC分类号: C01B33/14
The invention provides a preparation method of non-spherical silica sol. The method comprises steps that: (1) a non-spherical silica sol crystal seed mother liquor with a particle size of 20-50nm is prepared; (2) water-soluble silica sol with an alcohol content lower than 5wt% is prepared. The method provided by the invention has technical effects that: a sol-gel method is adopted; with process controls over material blending, material concentration, reaction liquid pH and reaction temperature during a reaction process, silica sol with a non-spherical structure is directly prepared. The method provided by the invention is advantaged in small amount of side reaction, short growing period, and simple technology. According to the method, no additive or inorganic salt is required to be added, and no surface modification process is required. The prepared silica sol can be used in a grinding and polishing process during a rough-polishing procedure in a CMP technology, and can be used as a carrier required in modification processes of other particles. In the non-spherical silica sol, content of spherical particles is lower than 5%. The particle size of the sol is controllable, and is 20-100nm. With an evaporation dehydration technology, the SiO2 content in the water-soluble silica sol is controlled at 5-50wt%.
IPC结构图谱:
C | 化学;冶金 |
--C01 | 无机化学 |
----C01B | 非金属元素;其化合物 |
------C01B33/00 | 硅;其化合物 |
--------C01B33/08 | .含卤素的化合物 |
----------C01B33/12 | ..硅石;其水合物,如勒皮硅酸 |
------------C01B33/14 | ...胶体硅石,如分散体、凝胶、溶胶 |