
基本信息:
- 专利标题: 硅片切削崩边控制方法
- 专利标题(英):Silicon slice cutting edge collapse control method
- 申请号:CN200710057424.1 申请日:2007-05-22
- 公开(公告)号:CN101310951A 公开(公告)日:2008-11-26
- 发明人: 仲跻和 , 李家荣 , 高如山
- 申请人: 天津晶岭电子材料科技有限公司
- 申请人地址: 天津市开发区微电子工业区中晓园2-B
- 专利权人: 天津晶岭电子材料科技有限公司
- 当前专利权人: 天津晶岭电子材料科技有限公司
- 当前专利权人地址: 天津市开发区微电子工业区中晓园2-B
- 代理机构: 天津三元专利商标代理有限责任公司
- 代理人: 胡婉明
- 主分类号: B28D1/32
- IPC分类号: B28D1/32
The invention provides a method for controlling broken edge when cutting a silicon slice, which comprises that: a rolling-finished silicon rod is adhered to a cutting machine; the rotating speed of the silicon rode, the knife-advancing speed of the cutting machine and the surface temperature of the blade of a cutting knife are regulated and controlled for cutting the silicon rod. The improvements of the method are that: the knife-advancing speed for cutting is controlled at 0.02cm/min to 0.1cm/min; the rotating speed of the silicon rod is controlled at 100turn/min to 500turn/min; the flux of cooling water is controlled at 2L/min to 5L/min; the surface temperature of the blade of the cutting knife is maintained lower than 40 DEG C. The method is applicable to the internal circle cutting and the line cutting in the processing of the silicon slice. By changing the conditions of a cutting technology, the effect for controlling the incidence rate of the broken edge of the silicon slice is realized; thus having the advantages of reasonable design of technological conditions, simple and convenient operation and relatively low production cost.
IPC结构图谱:
B | 作业;运输 |
--B28 | 加工水泥、黏土或石料 |
----B28D | 加工石头或类似石头的材料 |
------B28D1/00 | 不包含在其他类目中的石头或类似石头的材料,例如砖、混凝土的加工;所用的机械、装置、工具 |
--------B28D1/32 | .专门适用于加工易裂材料的方法或装置,例如用于加工云母、板石、片岩 |